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Saniwave Technology Co., Ltd.
Website: www.saniwaveltd.com
Tel: +86-755-89216755
Fax: +86-755-89264521
E-mail:  info@saniwaveltd.com
Address: 601, Building T, Hengyu Science 
and Technology Park, No.1 Ruiji Road, 
Longgang District, Shenzhen, China

Silicon Wafers
 Product >> Silicon Wafers >> All categories
 
Number:
SOW06
Name:
Silicon oxide wafer
Specifications:
6“,8“
Remarks:
Category:
Silicon Wafers
 
   Product description
Silicon oxide wafer
Oxidized silicon wafer refers to the thermal growth of a uniform dielectric thin film on the surface of a silicon wafer, used as insulation or mask material. The oxidation process includes high-temperature dry oxygen oxidation and high-temperature wet oxygen oxidation. The company adopts imported advanced oxidation equipment and processes to achieve uniform and accurate generation of the oxide layer.
Size: 2 ", 4", 6 ", 8", 10 ", 12"
N-type/P-type, intrinsic (undoped)
Total thickness: 250~600 μ m customizable
Thickness error: ± 10 μ m
Oxide layer thickness: 50nm~2000nm (conventional 100nm, 200nm, 300nm, 500nm, 1000nm)
Flatness (TIR):<3 μ m
Curvature (BOW): ≤ 15 μ m
TTV: ≤15μm,30μm
Roughness:<0.5nm
Electrical resistivity: 0.001~20000 (Ω· cm) according to customer requirements
Crystal orientation:<100>;< 110>;< 111>
Level: P
Surface treatment: single throw, double throw.
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