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深卫科技有限公司
官网：www.saniwaveltd.com
电话：0755-89264521
联系人：劳先生
E-mail: info@saniwaveltd.com
地址：深圳龙岗区瑞记路1号
恒裕科技园T座601
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单晶硅棒硅片 |
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| 产品 >> 单晶硅棒硅片 >> 所有小类 |
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产品编号： |
MSPW06 |
产品名称： |
Semiconductor Polished Wafer |
规 格： |
6" |
产品备注： |
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产品类别： |
单晶硅棒硅片 |
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| 产 品 说 明 |
6-inch semiconductor IC wafer
Price Grade
Product specifications:
Diameter: 100mm, 125mm, 150mm, 200mm
Growth mode: CZ
Dopants: P, P+, Boron/N, N+, Phos, Sb, As
Product direction: 1-0-0/1-1-1/1-1-0
Negative rate: P: 0.001-300, N: Photos 0.0007-100, Sb. 0.0006-0.02
Oxygen content: 6-18PPMA (New ASTM)
Carbon content: 0.5PPMA Max
Body metal content: 5 * 1010 atoms/cm2 Max
Dislocation: None
Total flatness: 2.0 Microns Max
Total thickness change: 3.0 Microns Max
Local flatness: 1.0 Microns Max
Warpage: 30 Microns Max
Thickness: Target+/-15 Microns
Frontal particle count: 0.3 Microns 10 Max/Worker 0.2 Microns 10 Max/Worker
Silicon front: BSD/Poly/SiO2/Etched
Hard/Soft laser marking
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